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Machine Vision for Semi-Conductor Manufacture



Variations in brightness and light uniformity can introduce error into machine-vision systems used in semiconductor wire bonding. A time-consuming and somewhat unpredictable technique to compensate for light variations, which involves attaching a diffuser surface to one side of a machine-vision system’s condenser lens, is now being replaced by the use of a holographic diffuser/condenser lens assembly.

Kulicke & Soffa Industries Inc. (K&S), a US producer of semiconductor-manufacturing equipment, uses ultrasonic technology to bond gold or aluminum wire to a silicon chip to prepare it for installation into a printed circuit board. The illuminator in the machine-vision system in the computerized wire bonder uses LED-generated light to help govern die alignment and wire placement.

To compensate for LEDs’ inconsistencies in brightness, light structure and light distribution, K&S has traditionally glass-bead-blasted and lacquered a diffuser surface to one side of an off-the-shelf condenser lens. But this process is difficult to control, often resulting in undesirable lens variations. Now K&S uses a holographic diffuser/lens optical component to overcome deviations in the software-controlled LED used in the wire bonder's machine-vision system, leading to what it says are noticeable improvements in brightness and light uniformity.

Manufactured by Torrance, Calif.-based Physical Optics Corp., the new optics assembly in the K&S wire bonder integrates two complex optical elements – a holographic Light Shaping Diffuser (LSD) attached by a high-precision process to the plano side of a standard glass condenser lens.

Reference-point location
The LSD homogenizes and shapes the light before feeding it through the focusing condenser lens, allowing the wire bonder's pattern-recognition system to easily locate reference points on the die pad. The holographic diffuser/lens works with fewer surfaces than the components in the previous setups and is prealigned. It enables the machine to bond the tiny wires – typically about 0.001 in. in diameter – with more precision and accuracy than was possible with the manually applied diffuser surface.

Based on refraction rather than diffraction, the LSDs used in the wire bonder homogenize and transmit more than 90 percent of the LED light, enhancing image quality and machine performance. These surface-relief holographic elements shape light by precisely controlling the energy distribution along the horizontal and vertical axes, allowing engineers to match the light source with the area requiring illumination. As a result, the diffuser/lens optical component helps increase the throughput of Kulicke & Soffa’s wire bonder, while also improving the reliability and quality of the bonded semiconductors.

Contact: Stan Szczesniak, Kulicke & Soffa Industries Inc, 2101 Blair Mill Road, Willow Grove, PA 19090; (215)784-6000; FAX, (215)784-6850; Rick Shie, Physical Optics Corp., 20600 Grammercy Place, Building 100, Torrance, CA 90501-1821; (310)320-3088; FAX, (310)320-8067


FIGURE 1:Kulicke & Soffa's wire equipment uses light-shaping diffusers made by Physical Optics Corp. to help locate reference points on the die pad during semiconductor manufacture. This close-up shows the wire-bonding operation, during which a bond head attaches very find gold or aluminum wire (typically 0.001 in. in diameter) to specific locations (pins) on the die pads and then to leads on the package.
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Reprinted from the November 1995 issue of PHOTONICS SPECTRA © Laurin Publishing Co., Inc.
20600 Gramercy Place, Building 100, Torrance, CA 90501-1821 (U.S.A.)
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© 2003 Physical Optics Corporation